Handbook of Thin Film Process Technology 98/1: Reactive Sputtering - D. Glocker - Paperback

A special issue on reactive sputtering which will be of interest to a wide range of industrial and academic researchers in addition to owners of the main Handbook. Some recent developments in the reactive sputtering field are covered, including unbalanced magnetron sputtering and pulsed reactive sputtering. The articles contain a wealth of practical information relating to applications, practice and manufacturing techniques.Glocker, D. is the author of 'Handbook of Thin Film Process Technology 98/1: Reactive Sputtering - D. Glocker - Paperback' with ISBN 9780750305280 and ISBN 0750305282.