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9780070627352

Vlsi Technology

Vlsi Technology
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  • ISBN-13: 9780070627352
  • ISBN: 0070627355
  • Edition: 2
  • Publication Date: 1988
  • Publisher: McGraw-Hill Higher Education

AUTHOR

Sze, Simon M.

SUMMARY

1 Crystal Growth and water prepreparation 2 Epitaxy 3 Oxidation 4 Lithography 5 Reactive Plasma Etching 6 Dielectric and Polysilicon Film Deposition 7 Diffusion, Ion Implementation 8 Metallization 9 Process Simulation 10 LSI Process Integration 11 Analytical Techniques 12 Assembly techniques and Packaging of VLSI Devices 13 Yield and ReliabilitySze, Simon M. is the author of 'Vlsi Technology', published 1988 under ISBN 9780070627352 and ISBN 0070627355.

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