An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends. A solutions manual is available upon request from the Wiley editorial board.Sze, Simon M. is the author of 'Semiconductor Sensors' with ISBN 9780471546092 and ISBN 0471546097.