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9780471546092

Semiconductor Sensors

Semiconductor Sensors
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  • ISBN-13: 9780471546092
  • ISBN: 0471546097
  • Publisher: Wiley & Sons, Incorporated, John

AUTHOR

Sze, Simon M.

SUMMARY

An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends. A solutions manual is available upon request from the Wiley editorial board.Sze, Simon M. is the author of 'Semiconductor Sensors' with ISBN 9780471546092 and ISBN 0471546097.

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