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Publication Date: 2000
Publisher: Prentice Hall
Quirk, Michael, Serda, Julian
This book is written for students in two- and four-year technology programs at community colleges and universities. Chapters are organized around the broad technologies applicable to semiconductor manufacturing. Chapters 1 to 8 present fundamental technical information relevant to semiconductor manufacturing. Chapter 9 presents a process model overview with a general flowchart that links the major areas in wafer fabrication. Chapters 10 to 19 cover each of the major processes. Each process chapter concludes with a summary of quality measures and troubleshooting issues to provide the student with practical challenges encountered during wafer fabrication. Chapter 20 provides an overview of the back-end process for IC assembly and packaging. Academic and industry reviewers have applauded this book as the most comprehensive and up-to-date text currently available in the market.Quirk, Michael is the author of 'Semiconductor Manufacturing Technology', published 2000 under ISBN 9780130815200 and ISBN 0130815209.