Name: Principles of Lithography (SPIE PRESS Monograph Vol. PM97)
Author: Harry J. Levinson
ISBN: 9780819440457

by Harry J. Levinson

Principles of Lithography (SPIE PRESS Monograph Vol. PM97)

by Harry J. Levinson

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ISBN-13: 9780819440457
ISBN: 0819440450
Publisher: Society of Photo Optical

AUTHOR

Harry J. Levinson

SUMMARY

The ability to pack large numbers of individual transistors in a small area of silicon has enabled the great functionality of modern microelectronics, specifically integrated circuits. This book focuses on photolithography--the method used for patterning nearly all integrated circuits fabricated today. It is a comprehensive introduction for novice lithographers and a valuable reference for professionals.Harry J. Levinson is the author of 'Principles of Lithography (SPIE PRESS Monograph Vol. PM97)' with ISBN 9780819440457 and ISBN 0819440450.

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