6839189

9780982299104

Practical MEMS: Analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and microfluidic Systems

Practical MEMS: Analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and microfluidic Systems
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  • ISBN-13: 9780982299104
  • ISBN: 0982299109
  • Publication Date: 2009
  • Publisher: Small Gear Publishing

AUTHOR

Kaajakari, Ville

SUMMARY

Kaajakari, Ville is the author of 'Practical MEMS: Analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and microfluidic Systems', published 2009 under ISBN 9780982299104 and ISBN 0982299109.

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