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9780841230552

Polymeric Materials for Microelectronic Applications Science and Technology

Polymeric Materials for Microelectronic Applications Science and Technology
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  • ISBN-13: 9780841230552
  • ISBN: 0841230552
  • Publisher: American Chemical Society

AUTHOR

Ito, Hiroshi, Tagawa, Seiichi, Horie, Kazuyuki

SUMMARY

Reports recent developments in polymer science and technology pertinent to microelectronics. Addresses such topics as photophysics and radiation physics and chemistry of polymers; photoresists, electron beam resists, and X-ray resists; insulating materials in microelectronics; photoresponsive materials; silicon-containing polymers; conducting polymers; and optoelectronic materials. Includes international contributions from both academia and industry.Ito, Hiroshi is the author of 'Polymeric Materials for Microelectronic Applications Science and Technology' with ISBN 9780841230552 and ISBN 0841230552.

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