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9780819457288
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Includes Proceedings Vols. 5715, 5716, 5717, 5718, 5719, 5720, 5721Society of Photo-Optical Instrumentation Engineers (SPIE) is the author of 'Photonics West CDS159 : Moems,Mems,Micro and Nanofabrication', published 2005 under ISBN 9780819457288 and ISBN 0819457280.
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