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9781558996786

Nano- And Microelectromechanical Systems (Nems and Mems) and Molecular Mac Hines

Nano- And Microelectromechanical Systems (Nems and Mems) and Molecular Mac Hines
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  • ISBN-13: 9781558996786
  • ISBN: 1558996788
  • Publication Date: 2003
  • Publisher: Materials Research Society

AUTHOR

LaVan, David A., Ayon, Arturo A., Buchheit, Thomas E.

SUMMARY

This volume broadens the scope from "conventional" MEMS to include issues relating to BioMEMS, NEMS, and molecular machines and the interfaces between these fields. Although originally based in silicon microelectronics technology, the reach of NEMS and MEMS is now extending to new materials such as diamond, silicon carbide, metals and polymers, with new fabrication techniques such as soft lithography, self organization and high-aspect-ratio processing. While the potential of NEMS and MEMS to develop in many markets exists, new product introduction is often limited by perplexing materials issues created by the large surface-to-volume ratio of NEMS and MEMS components, increased influence on local microstructure variations and other size-scale-related phenomena. Likewise, new materials and applications envisioned for NEMS and MEMS introduce a number of new processing and packaging issues, such as biocompatibility and stability in oxidizing or aqueous environments. NEMS and MEMS also provide significant potential to study "in situ thin-film properties with extraordinary resolution. Properly designed structures fabricated side-by-side with NEMS and MEMS structures and integrated with advanced metrology methods provide unprecedented resolution for measuring a given material property. The volume is devoted to improving the understanding of materials behavior and device issues at the micro-, nano- and molecular scale as well as the behavior and interface between micro-, nano- and molecular devices.LaVan, David A. is the author of 'Nano- And Microelectromechanical Systems (Nems and Mems) and Molecular Mac Hines', published 2003 under ISBN 9781558996786 and ISBN 1558996788.

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