Microelectronics Processing Chemical Engineering Aspects

Microelectronics Processing Chemical Engineering Aspects
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  • Comments: Spine creases, wear to binding and pages from reading. May contain limited notes, underlining or highlighting that does affect the text. Possible ex library copy, thatll have the markings and stickers associated from the library. Accessories such as CD, codes, toys, may not be included.

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  • ISBN-13: 9780841214750
  • ISBN: 0841214751
  • Publisher: American Chemical Society


Hess, Dennis W., Jensen, Klavs F.


Although chemical engineering principles are at the heart of solid state process technology, until now no reference volume addressing this relationship was available. This is the first book of its kind to tie fundamental engineering concepts to solid state process technology. Discussing thebasic concepts involved--liquid-phase epitaxy, physical and chemical vapor deposition, diffusion and oxidation in silicon, resists in microlithography, etc.--this volume will be particularly useful in chemical engineering courses. It offers a framework within which specialized courses inmicroelectronics processing can be organized. In addition, it serves as a valuable reference source for all industrial engineers working with the individual process steps covered.Hess, Dennis W. is the author of 'Microelectronics Processing Chemical Engineering Aspects' with ISBN 9780841214750 and ISBN 0841214751.

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