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9780849380693
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This work examines various types of MEMS devices and sensors for potential applications in commercial, industrial, military, and space systems. It addresses design and development issues for nanotechnology-based MEMS devices and sensors. The text also details the latest fabrication and packaging techniques and summarizes the benefits of MEMS devices in health monitoring, microneurosurgery, remotely piloted vehicles, UAVs, space surveillance, and medical diagnostics applications.Jha, A. R. is the author of 'MEMS and Nanotechnology-based Sensors and Devices for Communications, Medical and Aerospace Applications', published 2008 under ISBN 9780849380693 and ISBN 0849380693.
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