164760
9780072393910
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This is an overview of microsystems and MEMS (microelectromechanical systems) written from an engineering design point of view. It contains practical examples, cases, applied problems, and a brief overview of topics.Hsu, Tai-Ran is the author of 'Mems and Microsystems Design and Manufacture' with ISBN 9780072393910 and ISBN 0072393912.
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