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9781402071751

Materials & Process Integration for Mems

Materials & Process Integration for Mems
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  • ISBN-13: 9781402071751
  • ISBN: 1402071752
  • Publisher: Springer

AUTHOR

Tay, Francis E. H.

SUMMARY

These reviews cover the background, tools, and directions to take when choosing fabrication methods and materials for miniaturization projects. The state-of-the-art in nanotechnology is down to the molecular level but that's only what is publicly acknowledged and micro-mechanical systems are changing fast.Tay, Francis E. H. is the author of 'Materials & Process Integration for Mems' with ISBN 9781402071751 and ISBN 1402071752.

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