7724167
9780387095103
This title is a practical introduction to MEMS for advanced undergraduate and graduate students. It introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.Maurer, H. A. is the author of 'Introductory MEMS: Fabrication and Applications (Lecture Notes in Computer Science)', published 2009 under ISBN 9780387095103 and ISBN 0387095101.
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