4398781
9780819459770
BioMEMS is a science that includes more than simply finding biomedical applications for micro electromechanical systems devices. This book is an introduction to the science and a survey of the state of the art. Topics include micro fabrication of silicon, glass and polymer devices and actuators.Saliterman, Steven is the author of 'Fundamentals of Biomems And Medical Microdevices ', published 2006 under ISBN 9780819459770 and ISBN 0819459771.
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