4015977
9780521017961
This book is the first to give a comprehensive review of the theory, fabrication, characterisation, and device applications of abrupt, shallow, and narrow doping profiles in semiconductors. Such doping profiles are a key element in the development of modern semiconductor technology.Schubert, E. F. is the author of 'Delta-Doping of Semiconductors' with ISBN 9780521017961 and ISBN 0521017963.
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