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Publisher: Diane Pub Co
Michael T. Postek
Optical microscopy, scanning electron microscopy & the various forms of scanning probe microscopies are major microscopical techniques used to make measurements during the manufacture of integrated circuits. This report reviews the current state of SEM metrology in light of the many recent improvements. Charts & tables.Michael T. Postek is the author of 'Critical Issues in Scanning Electron Microscope Metrology: September-October 1994' with ISBN 9780788115523 and ISBN 0788115529.
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