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9781402005251

Chemical Physics of Thin Film Deposition Processes for Micro- And Nano-Technologies

Chemical Physics of Thin Film Deposition Processes for Micro- And Nano-Technologies
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Product details

  • ISBN-13: 9781402005251
  • ISBN: 1402005253
  • Publisher: Springer

AUTHOR

Pauleau, Y., NATO Advanced Study Institute on the Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies Staff

SUMMARY

This is an up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies.Pauleau, Y. is the author of 'Chemical Physics of Thin Film Deposition Processes for Micro- And Nano-Technologies' with ISBN 9781402005251 and ISBN 1402005253.

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