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Metal Impurities in Silicon-Device Fabrication






Edition:  2
Pub Date: 
Publisher:  Springer
Summary: Metal Impurities in Silicon-Device Fabricationtreats the transition-metal impurities generated during the fabrication of silicon samples and devices. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in moder...n technology. Finally, impurity gettering is studied along with modern techniques to determine the gettering efficiency. In all of these subjects, reliable and up-to-date data are presented. This monograph provides a thorough review of the results of recent scientific investigations, as well as the relevant data and properties of the various metal impurities in silicon. The new edition includes important recent data and a number of new tables.

Graff, Klaus is the author of Metal Impurities in Silicon-Device Fabrication, published 2000 under ISBN 9783540642138 and 3540642137. Two hundred seven Metal Impurities in Silicon-Device Fabrication textbooks are available for sale on ValoreBooks.com, fifty one used from the cheapest price of $90.90, or buy new starting at $49.88.
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Metal Impurities in Silicon-Device Fabrication

ISBN-13: 9783540642138

ISBN: 3540642137

Edition: 2nd

Pub Date:
Publisher: Springer
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