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Fundamentals of Microfabrication






Publisher:  CRC Press
Summary: Fundamentals of Microfabrication is the first book to examine all aspects of the attempt to build functional devices at a molecular size. Ten chapters discuss in detail topics such as lithography, pattern transfer, wet and dry bulk micromachining, surface micromachining, and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging ...issues are defined. The book also presents quantum structures and reviews molecular engineering. Numerous appendices offer valuable information in an easily accessible format.

Madou, Marc J. is the author of Fundamentals of Microfabrication, published under ISBN 9780849394515 and 0849394511. Seven Fundamentals of Microfabrication textbooks are available for sale on ValoreBooks.com, two used from the cheapest price of $20.99, or buy new starting at $33.31.
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Fundamentals of Microfabrication

ISBN-13: 9780849394515

ISBN: 0849394511

Publisher: CRC Press
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