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Critical Issues in Scanning Electron Microscope Metrology September-October 1994

Author: 


ISBN-13: 

9780788115523


ISBN: 

0788115529


Publisher:  DIANE Publishing Company
Summary: Optical microscopy, scanning electron microscopy & the various forms of scanning probe microscopies are major microscopical techniques used to make measurements during the manufacture of integrated circuits. This report reviews the current state of SEM metrology in light of the many recent improvements. Charts & tables.

Postek, Michael T. is the author of Critical Issues in Scanning Electron Microscope Metro...logy September-October 1994, published under ISBN 9780788115523 and 0788115529. One hundred seven Critical Issues in Scanning Electron Microscope Metrology September-October 1994 textbooks are available for sale on ValoreBooks.com, seven used from the cheapest price of $48.94, or buy new starting at $106.90. [read more]

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ISBN-13: 9780788115523


ISBN: 0788115529


Publisher: DIANE Publishing Company
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